Emergence of non-linear effects in nanocluster collision cascades in amorphous silicon

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http://hdl.handle.net/10138/166260

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Samela , J & Nordlund , K 2008 , ' Emergence of non-linear effects in nanocluster collision cascades in amorphous silicon ' New Journal of Physics , vol. 10 , pp. 023013 . DOI: 10.1088/1367-2630/10/2/023013

Title: Emergence of non-linear effects in nanocluster collision cascades in amorphous silicon
Author: Samela, Juha; Nordlund, Kai
Contributor: University of Helsinki, Accelerator Laboratory (Department of Physics) (-2009)
Date: 2008
Language: eng
Number of pages: 24
Belongs to series: New Journal of Physics
ISSN: 1367-2630
URI: http://hdl.handle.net/10138/166260
Abstract: Cluster ion beams create considerably more damage in silicon and other substrates and eject more material than single ions that deposit at the same kinetic energy on the substrate. The mechanisms that causes the non-linear growth of damage and sputtering are interesting from the point of view of both basic materials research and industrial applications. Using classical molecular dynamics, we analyse the dynamics of collision cascades that are induced in amorphous silicon by small noble gas nanoclusters. We show that the sputtering and other non-linear effects emerge due to the high-energy density induced in a relatively small region in the substrate during the cluster stopping phase and because of the timing of consequent events that dissipate the energy over a larger volume of the substrate.
Subject: 114 Physical sciences
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