Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer

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Penttilä , A , Maconi , G , Kassamakov , I , Gritsevich , M , Helander , P , Puranen , T , Haeggström , E & Muinonen , K 2017 , ' Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer ' , Proceedings of SPIE, the International Society for Optical Engineering , vol. 10330 , 10330 0A . https://doi.org/10.1117/12.2267863

Title: Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer
Author: Penttilä, Antti; Maconi, Göran; Kassamakov, Ivan; Gritsevich, Maria; Helander, Petteri; Puranen, Tuomas; Haeggström, Edward; Muinonen, Karri
Contributor organization: Department of Physics
Planetary-system research
Date: 2017
Language: eng
Number of pages: 7
Belongs to series: Proceedings of SPIE, the International Society for Optical Engineering
ISSN: 0277-786X
DOI: https://doi.org/10.1117/12.2267863
URI: http://hdl.handle.net/10138/228585
Abstract: We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Description: Volume: 10330 Host publication title: Modeling Aspects in Optical Metrology VI Isbn(print): 978-1-5106-1106-1 Isbn(electronic): 978-1-5106-1105-4
Subject: 114 Physical sciences
Peer reviewed: Yes
Usage restriction: openAccess
Self-archived version: acceptedVersion


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