Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer

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http://hdl.handle.net/10138/228585

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Penttilä , A , Maconi , G , Kassamakov , I , Gritsevich , M , Helander , P , Puranen , T , Haeggström , E & Muinonen , K 2017 , ' Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer ' , Proceedings of SPIE, the International Society for Optical Engineering , vol. 10330 , 10330 0A . https://doi.org/10.1117/12.2267863

Julkaisun nimi: Experimental light scattering by small particles : First results with a novel Mueller matrix scatterometer
Tekijä: Penttilä, Antti; Maconi, Göran; Kassamakov, Ivan; Gritsevich, Maria; Helander, Petteri; Puranen, Tuomas; Haeggström, Edward; Muinonen, Karri
Muu tekijä: University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
Päiväys: 2017
Kieli: eng
Sivumäärä: 7
Kuuluu julkaisusarjaan: Proceedings of SPIE, the International Society for Optical Engineering
ISSN: 0277-786X
URI: http://hdl.handle.net/10138/228585
Tiivistelmä: We describe a setup for measuring the full angular Mueller matrix profile of a single mm- to mu m-sized sample, and verify the experimental results against a theoretical model. The scatterometer has a fixed or levitating sample, illuminated with a laser beam whose full polarization state is controlled. The scattered light is detected with a combination of wave retarder, linear polarizer, and photomultiplier tube that is attached to a rotational stage. The first results are reported.
Avainsanat: 114 Physical sciences
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