Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films
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Tamm , A , Kalam , K , Seemen , H , Kozlova , J , Kukli , K , Aarik , J , Link , J , Stern , R , Duenas , S & Castan , H 2017 , ' Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films ' , ACS Omega , vol. 2 , no. 12 , pp. 8836-8842 . https://doi.org/10.1021/acsomega.7b01394
| Julkaisun nimi: | Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films |
| Tekijä: | Tamm, Aile; Kalam, Kristjan; Seemen, Helina; Kozlova, Jekaterina; Kukli, Kaupo; Aarik, Jaan; Link, Joosep; Stern, Raivo; Duenas, Salvador; Castan, Helena |
| Muu tekijä: | University of Helsinki, Department |
| Päiväys: | 2017-12 |
| Kieli: | eng |
| Sivumäärä: | 7 |
| Kuuluu julkaisusarjaan: | ACS Omega |
| ISSN: | 2470-1343 |
| URI: | http://hdl.handle.net/10138/299106 |
| Tiivistelmä: | Mixed films of a high-permittivity oxide, Er2O3, and a magnetic material, Fe2O3, were grown by atomic layer deposition on silicon and titanium nitride at 375 degrees C using erbium diketonate, ferrocene, and ozone as precursors. Crystalline phases of erbium and iron oxides were formed. Growth into three-dimensional trenched structures was demonstrated. A structure deposited using tens to hundreds subsequent cycles for both constituent metal oxide layers promoted both charge polarization and saturative magnetization compared to those in the more homogeneously mixed films. |
| Avainsanat: |
ERFE2O4
GROWTH 116 Chemical sciences |
| Tekijänoikeustiedot: |
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