Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films

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dc.contributor University of Helsinki, Department en
dc.contributor.author Tamm, Aile
dc.contributor.author Kalam, Kristjan
dc.contributor.author Seemen, Helina
dc.contributor.author Kozlova, Jekaterina
dc.contributor.author Kukli, Kaupo
dc.contributor.author Aarik, Jaan
dc.contributor.author Link, Joosep
dc.contributor.author Stern, Raivo
dc.contributor.author Duenas, Salvador
dc.contributor.author Castan, Helena
dc.date.accessioned 2019-02-15T11:17:01Z
dc.date.available 2019-02-15T11:17:01Z
dc.date.issued 2017-12
dc.identifier.citation Tamm , A , Kalam , K , Seemen , H , Kozlova , J , Kukli , K , Aarik , J , Link , J , Stern , R , Duenas , S & Castan , H 2017 , ' Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films ' , ACS Omega , vol. 2 , no. 12 , pp. 8836-8842 . https://doi.org/10.1021/acsomega.7b01394 en
dc.identifier.issn 2470-1343
dc.identifier.other PURE: 122355774
dc.identifier.other PURE UUID: bae7128f-7266-497a-9a6d-292eb571c6dc
dc.identifier.other WOS: 000418744400035
dc.identifier.uri http://hdl.handle.net/10138/299106
dc.description.abstract Mixed films of a high-permittivity oxide, Er2O3, and a magnetic material, Fe2O3, were grown by atomic layer deposition on silicon and titanium nitride at 375 degrees C using erbium diketonate, ferrocene, and ozone as precursors. Crystalline phases of erbium and iron oxides were formed. Growth into three-dimensional trenched structures was demonstrated. A structure deposited using tens to hundreds subsequent cycles for both constituent metal oxide layers promoted both charge polarization and saturative magnetization compared to those in the more homogeneously mixed films. en
dc.format.extent 7
dc.language.iso eng
dc.relation.ispartof ACS Omega
dc.rights en
dc.subject ERFE2O4 en
dc.subject GROWTH en
dc.subject 116 Chemical sciences en
dc.title Magnetic and Electrical Performance of Atomic Layer Deposited Iron Erbium Oxide Thin Films en
dc.type Article
dc.description.version Peer reviewed
dc.identifier.doi https://doi.org/10.1021/acsomega.7b01394
dc.type.uri info:eu-repo/semantics/other
dc.type.uri info:eu-repo/semantics/publishedVersion
dc.contributor.pbl

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