Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films

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http://hdl.handle.net/10138/302076

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Mattinen , M , King , P J , Khriachtchev , L , Meinander , K , Gibbon , J T , Dhanak , V R , Räisänen , J , Ritala , M & Leskelä , M 2018 , ' Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films ' , Small , vol. 14 , no. 21 , 1800547 . https://doi.org/10.1002/smll.201800547

Title: Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films
Author: Mattinen, Miika; King, Peter J.; Khriachtchev, Leonid; Meinander, Kristoffer; Gibbon, James T.; Dhanak, Vin R.; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku
Contributor: University of Helsinki, Department of Chemistry
University of Helsinki, Department of Chemistry
University of Helsinki, Department of Chemistry
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Chemistry
University of Helsinki, Department of Chemistry
Date: 2018-05-24
Language: eng
Number of pages: 8
Belongs to series: Small
ISSN: 1613-6810
URI: http://hdl.handle.net/10138/302076
Abstract: Semiconducting 2D materials, such as SnS2, hold immense potential for many applications ranging from electronics to catalysis. However, deposition of few-layer SnS2 films has remained a great challenge. Herein, continuous wafer-scale 2D SnS2 films with accurately controlled thickness (2 to 10 monolayers) are realized by combining a new atomic layer deposition process with low-temperature (250 degrees C) postdeposition annealing. Uniform coating of large-area and 3D substrates is demonstrated owing to the unique self-limiting growth mechanism of atomic layer deposition. Detailed characterization confirms the 1T-type crystal structure and composition, smoothness, and continuity of the SnS2 films. A two-stage deposition process is also introduced to improve the texture of the films. Successful deposition of continuous, high-quality SnS2 films at low temperatures constitutes a crucial step toward various applications of 2D semiconductors.
Subject: 2d materials
atomic layer deposition
semiconductors
SnS2
thin films
CHEMICAL-VAPOR-DEPOSITION
TRANSITION-METAL DICHALCOGENIDES
ATOMIC LAYER DEPOSITION
SINGLE-CRYSTAL SNS2
MOLYBDENUM-DISULFIDE
GROWTH
TRANSISTORS
NANOSHEETS
MOS2
116 Chemical sciences
114 Physical sciences
221 Nano-technology
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