Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films

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http://hdl.handle.net/10138/302076

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Mattinen , M , King , P J , Khriachtchev , L , Meinander , K , Gibbon , J T , Dhanak , V R , Räisänen , J , Ritala , M & Leskelä , M 2018 , ' Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films ' , Small , vol. 14 , no. 21 , 1800547 . https://doi.org/10.1002/smll.201800547

Title: Low-Temperature Wafer-Scale Deposition of Continuous 2D SnS2 Films
Author: Mattinen, Miika; King, Peter J.; Khriachtchev, Leonid; Meinander, Kristoffer; Gibbon, James T.; Dhanak, Vin R.; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku
Contributor organization: Department of Chemistry
Department of Physics
Mikko Ritala / Principal Investigator
Date: 2018-05-24
Language: eng
Number of pages: 8
Belongs to series: Small
ISSN: 1613-6810
DOI: https://doi.org/10.1002/smll.201800547
URI: http://hdl.handle.net/10138/302076
Abstract: Semiconducting 2D materials, such as SnS2, hold immense potential for many applications ranging from electronics to catalysis. However, deposition of few-layer SnS2 films has remained a great challenge. Herein, continuous wafer-scale 2D SnS2 films with accurately controlled thickness (2 to 10 monolayers) are realized by combining a new atomic layer deposition process with low-temperature (250 degrees C) postdeposition annealing. Uniform coating of large-area and 3D substrates is demonstrated owing to the unique self-limiting growth mechanism of atomic layer deposition. Detailed characterization confirms the 1T-type crystal structure and composition, smoothness, and continuity of the SnS2 films. A two-stage deposition process is also introduced to improve the texture of the films. Successful deposition of continuous, high-quality SnS2 films at low temperatures constitutes a crucial step toward various applications of 2D semiconductors.
Subject: 2d materials
atomic layer deposition
semiconductors
SnS2
thin films
CHEMICAL-VAPOR-DEPOSITION
TRANSITION-METAL DICHALCOGENIDES
ATOMIC LAYER DEPOSITION
SINGLE-CRYSTAL SNS2
MOLYBDENUM-DISULFIDE
GROWTH
TRANSISTORS
NANOSHEETS
MOS2
116 Chemical sciences
114 Physical sciences
221 Nano-technology
Peer reviewed: Yes
Usage restriction: openAccess
Self-archived version: acceptedVersion


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