Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition

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Nieminen , H , Miikkulainen , V , Settipani , D , Simonelli , L , Hönicke , P , Zech , C , Kayser , Y , Beckhoff , B , Honkanen , A-P , Heikkilä , M , Mizohata , K , Meinander , N K , Ylivaara , O M E , Huotari , S & Ritala , M 2019 , ' Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition ' , Journal of Physical Chemistry C , vol. 123 , no. 25 , pp. 15802-15814 . https://doi.org/10.1021/acs.jpcc.9b03039

Title: Intercalation of Lithium Ions from Gaseous Precursors into beta-MnO2 Thin Films Deposited by Atomic Layer Deposition
Author: Nieminen, Heta; Miikkulainen, Ville; Settipani, Daniel; Simonelli, Laura; Hönicke, Philipp; Zech, Claudia; Kayser, Yves; Beckhoff, Burkhard; Honkanen, Ari-Pekka; Heikkilä, Mikko; Mizohata, Kenichiro; Meinander, Nils Kristoffer; Ylivaara, Oili M. E.; Huotari, Simo; Ritala, Mikko
Contributor: University of Helsinki, Department
University of Helsinki, Department of Chemistry
University of Helsinki, Department of Physics
University of Helsinki, Materials Physics
University of Helsinki, Department of Chemistry
University of Helsinki, Materials Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Chemistry
Date: 2019-06-27
Language: eng
Number of pages: 13
Belongs to series: Journal of Physical Chemistry C
ISSN: 1932-7447
URI: http://hdl.handle.net/10138/303980
Abstract: LiMn2O4 is a promising candidate for a cathode material in lithium-ion batteries because of its ability to intercalate lithium ions reversibly through its three-dimensional manganese oxide network. One of the promising techniques for depositing LiMn2O4 thin-film cathodes is atomic layer deposition (ALD). Because of its unparalleled film thickness control and film conformality, ALD helps to fulfill the industry demands for smaller devices, nanostructured electrodes, and all-solid-state batteries. In this work, the intercalation mechanism of Li+ ions into an ALD-grown beta-MnO2 thin film was studied. Samples were prepared by pulsing (LiOBu)-Bu-t and H2O for different cycle numbers onto about 100 nm thick MnO2 films at 225 degrees C and characterized with X-ray absorption spectroscopy, X-ray diffraction, X-ray reflectivity, time-of-flight elastic recoil detection analysis, and residual stress measurements. It is proposed that for
Subject: CATHODE
ELECTROCHEMICAL CHARACTERIZATION
ELECTRONIC-STRUCTURE
FINE-STRUCTURE
INSERTION
LOCAL-STRUCTURE
MANGANESE OXIDE
SPINEL LIMN2O4
STRUCTURAL PHASE-TRANSITION
X-RAY-ABSORPTION
114 Physical sciences
116 Chemical sciences
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