Subsurface metrology using scanning white light interferometry : absolute z coordinates deep inside displays

Show full item record



Permalink

http://hdl.handle.net/10138/307962

Citation

Nolvi , A , Kassamakov , I & Haeggström , E 2018 , ' Subsurface metrology using scanning white light interferometry : absolute z coordinates deep inside displays ' , Journal of the Optical Society of America. A : Optics, Image Science, and Vision , vol. 35 , no. 1 , pp. A18-A22 . https://doi.org/10.1364/JOSAA.35.000A18

Title: Subsurface metrology using scanning white light interferometry : absolute z coordinates deep inside displays
Author: Nolvi, Anton; Kassamakov, Ivan; Haeggström, Edward
Contributor: University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
Date: 2018-01-01
Language: eng
Number of pages: 5
Belongs to series: Journal of the Optical Society of America. A : Optics, Image Science, and Vision
ISSN: 1084-7529
URI: http://hdl.handle.net/10138/307962
Abstract: Mobile devices with interactive displays are ubiquitous commodities. Efficient quality control (QC) drives competitiveness. Scanning white light interferometry imaging offers a fast and nondestructive tool for QC purposes. Relying on optical compensation and image stitching, one can rapidly and cost-effectively produce sharp 3D images of a display's inner structures with a few nanometers' accuracy along the z direction. As a practical example, 3D images of a mobile device display revealed 0.92 +/- 0.02 mu m height variation in the top glass assembly. The proposed method improves quality assurance methods of display manufacturing. (c) 2017 Optical Society of America
Subject: SURFACE
RESOLUTION
114 Physical sciences
Rights:


Files in this item

Total number of downloads: Loading...

Files Size Format View
Subsurface_metr ... erferometry_finaldraft.pdf 1.449Mb PDF View/Open

This item appears in the following Collection(s)

Show full item record