Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

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Mota-Santiago , P , Vazquez , H , Bierschenk , T , Kremer , F , Nadzri , A , Schauries , D , Djurabekova , F , Nordlund , K , Trautmann , C , Mudie , S , Ridgway , M C & Kluth , P 2018 , ' Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide ' , Nanotechnology , vol. 29 , no. 14 , 144004 . https://doi.org/10.1088/1361-6528/aaabdb

Title: Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide
Author: Mota-Santiago, P.; Vazquez, H.; Bierschenk, T.; Kremer, F.; Nadzri, A.; Schauries, D.; Djurabekova, F.; Nordlund, K.; Trautmann, C.; Mudie, S.; Ridgway, M. C.; Kluth, P.
Contributor: University of Helsinki, Helsinki Institute of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
Date: 2018-04-06
Language: eng
Number of pages: 13
Belongs to series: Nanotechnology
ISSN: 0957-4484
URI: http://hdl.handle.net/10138/308629
Abstract: The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 mu m thick amorphous SiNx:H and SiOx:H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiNx:H, the density variations show a radius of 4.2 nm with a relative density change three times larger than the value determined for amorphous SiOx:H, with a radius of 5.5 nm. Complementary infrared spectroscopy measurements exhibit a damage cross-section comparable to the core dimensions. The morphology of the density variations results from freezing in the local viscous flow arising from the non-uniform temperature profile in the radial direction of the ion path. The concomitant drop in viscosity mediated by the thermal conductivity appears to be the main driving force rather than the presence of a density anomaly.
Subject: swift heavy ion irradiation
ion tracks
silica
silicon nitride
SAXS
SI3N4 THIN-FILMS
THERMAL-CONDUCTIVITY
STRUCTURAL-PROPERTIES
TRACKS
INSULATORS
METALS
SI
PARAMETERIZATION
BOMBARDMENT
IRRADIATION
116 Chemical sciences
114 Physical sciences
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