Spatial distribution of particles sputtered from single crystals by gas cluster ions

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http://hdl.handle.net/10138/308791

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Nazarov , A V , Chernysh , V S , Nordlund , K , Djurabekova , F & Zhao , J 2017 , ' Spatial distribution of particles sputtered from single crystals by gas cluster ions ' , Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms , vol. 406 , pp. 518-522 . https://doi.org/10.1016/j.nimb.2017.01.014

Title: Spatial distribution of particles sputtered from single crystals by gas cluster ions
Author: Nazarov, A.V.; Chernysh, V.S.; Nordlund, Kai; Djurabekova, Flyura; Zhao, Junlei
Contributor: University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
Date: 2017-01-22
Language: eng
Number of pages: 5
Belongs to series: Nuclear Instruments & Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X
URI: http://hdl.handle.net/10138/308791
Abstract: The results of molecular dynamics simulations of the bombardment of the Cu (100) and Mo (100) single-crystals by 10 keV Ar cluster ions of different sizes are presented in this paper. Spatial distributions of sputtered material were calculated. The anisotropy of the angular distributions of sputtered atoms was revealed. It was found that the character of the anisotropy is different for Cu and Mo targets. The reasons leading to this anisotropy are discussed according to the dependences of the angular distributions on the cluster size and on the target material.
Subject: 114 Physical sciences
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