Microsphere-assisted phase-shifting profilometry

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Perrin , S , Leong-Hoi , A , Lecler , S , Pfeiffer , P , Kassamakov , I , Nolvi , A , Haeggström , E & Montgomery , P 2017 , ' Microsphere-assisted phase-shifting profilometry ' , Applied Optics , vol. 56 , no. 25 , pp. 7249-7255 . https://doi.org/10.1364/AO.56.007249

Title: Microsphere-assisted phase-shifting profilometry
Author: Perrin, Stephane; Leong-Hoi, Audrey; Lecler, Sylvain; Pfeiffer, Pierre; Kassamakov, Ivan; Nolvi, Anton; Haeggström, Edward; Montgomery, Paul
Contributor organization: Department of Physics
Date: 2017-09-01
Language: eng
Number of pages: 7
Belongs to series: Applied Optics
ISSN: 1559-128X
DOI: https://doi.org/10.1364/AO.56.007249
URI: http://hdl.handle.net/10138/312001
Abstract: In the present work, we have investigated the combination of a superresolution microsphere-assisted 2D imaging technique with low-coherence phase-shifting interference microscopy. The imaging performance of this technique is studied by numerical simulation in terms of the magnification and the lateral resolution as a function of the geometrical and optical parameters. The results of simulations are compared with the experimental measurements of reference gratings using a Linnik interference configuration. Additional measurements are also shown on nanostructures. An improvement by a factor of 4.7 in the lateral resolution is demonstrated in air, thus giving a more isotropic nanometric resolution for full-field surface profilometry in the far field. (C) 2017 Optical Society of America
114 Physical sciences
Peer reviewed: Yes
Rights: unspecified
Usage restriction: openAccess
Self-archived version: acceptedVersion

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