Nanopatterning of the (001) surface of crystalline Ge by ion irradiation at off-normal incidence : Experiment and simulation

Show full item record



Permalink

http://hdl.handle.net/10138/321565

Citation

Erb , D , de Schultz , R , Ilinov , A , Nordlund , K , Bradley , R M & Facsko , S 2020 , ' Nanopatterning of the (001) surface of crystalline Ge by ion irradiation at off-normal incidence : Experiment and simulation ' , Physical Review B , vol. 102 , no. 16 , 165422 . https://doi.org/10.1103/PhysRevB.102.165422

Title: Nanopatterning of the (001) surface of crystalline Ge by ion irradiation at off-normal incidence : Experiment and simulation
Author: Erb, Denise; de Schultz, Ricardo; Ilinov, Andrey; Nordlund, Kai; Bradley, R. Mark; Facsko, Stefan
Contributor: University of Helsinki, Department of Physics
University of Helsinki, Department of Physics
Date: 2020-10-26
Language: eng
Number of pages: 9
Belongs to series: Physical Review B
ISSN: 2469-9950
URI: http://hdl.handle.net/10138/321565
Abstract: Intricate topographical patterns can form on the surface of crystalline Ge(001) subject to low-energy ion irradiation in the reverse epitaxy regime, i.e., at elevated temperatures which enable dynamic recrystallization. We compare such nanoscale patterns produced by irradiation from varied polar and azimuthal ion incidence angles with corresponding calculated surface topographies. To this end, we propose a continuum equation including both anisotropic erosive and anisotropic diffusive effects. Molecular dynamics simulations provide the coefficients of angle-dependent sputter erosion for the calculations. By merely changing these coefficients accordingly, the experimentally observed surface morphologies can be reproduced, except for extreme ion incidence angles. Angle-dependent sputter erosion is thereby identified as a dominant mechanism in ion-induced pattern formation on crystalline surfaces under irradiation from off-normal incidence angles.
Subject: DYNAMICS
GROWTH
INSTABILITIES
BOMBARDMENT
MECHANISM
EVOLUTION
114 Physical sciences
Rights:


Files in this item

Total number of downloads: Loading...

Files Size Format View
PhysRevB.102.165422.pdf 6.086Mb PDF View/Open

This item appears in the following Collection(s)

Show full item record