Step height standards based on self-assembly for 3D metrology of biological samples

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dc.contributor University of Helsinki, Department of Physics en
dc.contributor University of Helsinki, University of Helsinki en
dc.contributor University of Helsinki, University of Helsinki en
dc.contributor University of Helsinki, University of Helsinki en
dc.contributor University of Helsinki, University of Helsinki en
dc.contributor University of Helsinki, Department of Physics en
dc.contributor.author Heikkinen, Terho
dc.contributor.author Kassamakov, I.
dc.contributor.author Viitala, T.
dc.contributor.author Järvinen, M.
dc.contributor.author Vainikka, T.
dc.contributor.author Nolvi, A.
dc.contributor.author Bermudez, C.
dc.contributor.author Artigas, R.
dc.contributor.author Martinez, P.
dc.contributor.author Korpelainen, Raija
dc.contributor.author Lassila, A.
dc.contributor.author Haeggström, E.
dc.date.accessioned 2021-01-12T12:48:01Z
dc.date.available 2021-01-12T12:48:01Z
dc.date.issued 2020-09
dc.identifier.citation Heikkinen , T , Kassamakov , I , Viitala , T , Järvinen , M , Vainikka , T , Nolvi , A , Bermudez , C , Artigas , R , Martinez , P , Korpelainen , R , Lassila , A & Haeggström , E 2020 , ' Step height standards based on self-assembly for 3D metrology of biological samples ' , Measurement Science and Technology , vol. 31 , no. 9 , 094008 . https://doi.org/10.1088/1361-6501/ab8c6a en
dc.identifier.issn 0957-0233
dc.identifier.other PURE: 158920367
dc.identifier.other PURE UUID: d327c8e8-9fcd-4fd4-8d37-5edf36d4a0ad
dc.identifier.other WOS: 000543888700001
dc.identifier.other ORCID: /0000-0001-9074-9450/work/86940226
dc.identifier.uri http://hdl.handle.net/10138/324426
dc.description.abstract Modern microscopes and profilometers such as the coherence scanning interferometer (CSI) approach sub-nm precision in height measurements. Transfer standards at all measured size scales are needed to guarantee traceability at any scale and utilize the full potential of these instruments, but transfer standards with similar characteristics upon reflection to those of the measured samples are preferred. This is currently not the case for samples featuring dimensions of less than 10 nm and for biosamples with different optical charasteristics to silicon, silica or metals. To address the need for 3D images of biosamples with traceable dimensions, we introduce a transfer standard with dimensions guaranteed by natural self-assembly and a material that is optically similar to that in typical biosamples. We test the functionality of these transfer standards by first calibrating them using an atomic force microscope (AFM) and then using them to calibrate a CSI. We investigate whether a good enough calibration accuracy can be reached to enable a useful calibration of the CSI system. The result is that the calibration uncertainty is only marginally increased due to the sample. en
dc.format.extent 6
dc.language.iso eng
dc.relation.ispartof Measurement Science and Technology
dc.rights en
dc.subject nanometrology en
dc.subject transfer standard en
dc.subject calibration en
dc.subject CSI en
dc.subject SWLI en
dc.subject AFM en
dc.subject traceability en
dc.subject CALIBRATION en
dc.subject 221 Nano-technology en
dc.title Step height standards based on self-assembly for 3D metrology of biological samples en
dc.type Article
dc.description.version Peer reviewed
dc.identifier.doi https://doi.org/10.1088/1361-6501/ab8c6a
dc.type.uri info:eu-repo/semantics/other
dc.type.uri info:eu-repo/semantics/publishedVersion
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