Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors

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Ghafourisaleh , S , Popov , G , Leskela , M , Putkonen , M & Ritala , M 2021 , ' Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors ' , ACS Omega , vol. 6 , no. 27 , pp. 17545-17554 . https://doi.org/10.1021/acsomega.1c02029

Title: Oxidative MLD of Conductive PEDOT Thin Films with EDOT and ReCl5 as Precursors
Author: Ghafourisaleh, Saba; Popov, Georgi; Leskela, Markku; Putkonen, Matti; Ritala, Mikko
Contributor organization: Department of Chemistry
Doctoral Programme in Materials Research and Nanosciences
Mikko Ritala / Principal Investigator
Doctoral Programme in Chemistry and Molecular Sciences
Date: 2021-07-13
Language: eng
Number of pages: 10
Belongs to series: ACS Omega
ISSN: 2470-1343
DOI: https://doi.org/10.1021/acsomega.1c02029
URI: http://hdl.handle.net/10138/332784
Abstract: Because of its high conductivity and intrinsic stability, poly(3,4-ethylenedioxythiophene (PEDOT) has gained great attention both in academic research and industry over the years. In this study, we used the oxidative molecular layer deposition (oMLD) technique to deposit PEDOT from 3,4-ethylenedioxythiophene (EDOT) and a new inorganic oxidizing agent, rhenium pentachloride (ReCl5). We extensively characterized the properties of the films by scanning electron microscopy, X-ray diffraction, X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDS), Raman, and conductivity measurements. The oMLD of polymers is based on the sequential adsorption of the monomer and its oxidation-induced polymerization. However, oMLD has been scarcely used because of the challenge of finding a suitable combination of volatile, reactive, and stable organic monomers applicable at high temperatures. ReCl5 showed promising properties in oMLD because it has high thermal stability and high oxidizing ability for EDOT. PEDOT films were deposited at temperatures of 125-200 degrees C. EDS and XPS measurements showed that the as-deposited films contained residues of rhenium and chlorine, which could be removed by rinsing the films with deionized water. The polymer films were transparent in the visible region and showed relatively high electrical conductivities within the 2-2000 S cm(-1) range.
Subject: 116 Chemical sciences
CHEMICAL-VAPOR-DEPOSITION
POLYMERS
POLY(3,4-ETHYLENEDIOXYTHIOPHENE)
TRANSPARENT
DERIVATIVES
POLYMERIZATION
ELECTRODE
Peer reviewed: Yes
Rights: cc_by
Usage restriction: openAccess
Self-archived version: publishedVersion


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