TY - T1 - Atomic Layer Deposition of Intermetallic Co3Sn2 and Ni3Sn2 Thin Films SN - / UR - http://hdl.handle.net/10138/322271 T3 - A1 - Väyrynen, Katja; Hatanpää, Timo; Mattinen, Miika; Mizohata, Kenichiro; Meinander, Kristoffer; Räisänen, Jyrki; Link, Joosep; Stern, Raivo; Ritala, Mikko; Leskela, Markku A2 - PB - Y1 - 2019 LA - eng AB - Intermetallics form a versatile group of materials that possess unique properties ranging from superconductivity to giant magnetoresistance. The intermetallic Co-Sn and Ni-Sn compounds are promising materials for magnetic applications as well as for anodes in lithium- and sodium-ion batteries. Herein, a method is presented for the preparation of Co3Sn2 and Ni3Sn2 thin films using diamine adducts of cobalt(II) and nickel(II) chlorides, CoCl2(TMEDA) and NiCl2(TMPDA) (TMEDA = N,N,N ',N '-tetramethy... VO - IS - SP - OP - KW - atomic layer deposition; Co3Sn2; intermetallics; Ni3Sn2; thin films; ELECTROCHEMICAL PERFORMANCE; CATALYTIC-PROPERTIES; DIFFUSION BARRIER; TIN-OXIDE; LITHIUM; ALLOY; SUPERCONDUCTIVITY; NANOPARTICLES; NANOALLOYS; ELECTRODES; 221 Nano-technology; 116 Chemical sciences; 114 Physical sciences N1 - PP - ER -