TY - T1 - Atomic Layer Deposition of Rhenium Disulfide SN - / UR - http://hdl.handle.net/10138/326483 T3 - A1 - Hämäläinen, Jani; Mattinen, Miika; Mizohata, Kenichiro; Meinander, Kristoffer; Vehkamäki, Marko; Räisänen, Jyrki; Ritala, Mikko; Leskelä, Markku A2 - PB - Y1 - 2018 LA - eng AB - 2D materials research is advancing rapidly as various new “beyond graphene” materials are fabricated, their properties studied, and materials tested in various applications. Rhenium disulfide is one of the 2D transition metal dichalcogenides that has recently shown to possess extraordinary properties such as that it is not limited by the strict monolayer thickness requirements. The unique inherent decoupling of monolayers in ReS2 combined with a direct bandgap and highly anisotropic properties m... VO - IS - SP - OP - KW - ALD; atomic layer deposition; ReS2; rhenium sulfide; transition metal dichalcogenides; LARGE-AREA; RES2 NANOSHEETS; CHEMICAL-VAPOR-DEPOSITION; FIELD-EFFECT TRANSISTORS; TRANSITION-METAL DICHALCOGENIDES; PHOTODETECTORS; GROWTH; 2-METHOXYPHENOL; CRYSTALS; CATALYSTS; 114 Physical sciences; 116 Chemical sciences N1 - PP - ER -