Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and In Situ Mass Spectrometry Studies

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http://urn.fi/URN:ISBN:952-10-0221-2
Title: Atomic Layer Deposition of Metal and Transition Metal Nitride Thin Films and In Situ Mass Spectrometry Studies
Author: Juppo, Marika
Contributor: University of Helsinki, Faculty of Science, Department of Chemistry
Publisher: Helsingin yliopisto
Date: 2001-12
URI: http://urn.fi/URN:ISBN:952-10-0221-2
http://hdl.handle.net/10138/21115
Thesis level: Doctoral dissertation
Rights: This publication is copyrighted. You may download, display and print it for Your own personal use. Commercial use is prohibited.


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